APPLICATION OF COMPUTER-AIDED DESIGN AND NUMERICAL SIMULATION FOR DESIGN OF HIGH-TEMPERATURE EQUIMMENT AND TECHNOLOGICAL PROCESES FOR PRODUCTION AND ANNEALING OF MATERIALS

Author(s): Dmitry Belov Yurievich, Yudin Mikhail Viktorovich

Rubric: Information technology

DOI: 10.21777/2500-2112-2016-1-60-63

Release: 2016-1 (13)

Pages: 60-63

Keywords: design, simulation, prototyping, silicon structures, thermal ovens and installations

Annotation: The report describes the application of computer-aided design and numerical simulation for design of the high-temperature furnaces and thermal units for shaped sapphire growing process and annealing of SiC epitaxial wafers. The use of these systems significantly shortens time of equipment design and allows making of a complex technological equipment with minimal breadboarding and experimental research

Bibliography: Dmitry BE.YU., Yudin MI.VI. APPLICATION OF COMPUTER-AIDED DESIGN AND NUMERICAL SIMULATION FOR DESIGN OF HIGH-TEMPERATURE EQUIMMENT AND TECHNOLOGICAL PROCESES FOR PRODUCTION AND ANNEALING OF MATERIALS // Education Resources and Technologies. – 2016. – № 1 (13). – С. 60-63. doi: 10.21777/2500-2112-2016-1-60-63